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SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Miniaturized Systems with Micro-Optics and MEMS - Finite element modeling of micromachined MEMS photon devices
Evans III, Boyd M., Schonberger, D. W., Datskos, Panos G., Motamedi, M. Edward, Goering, RolfVolume:
3878
Year:
1999
Language:
english
DOI:
10.1117/12.361268
File:
PDF, 1.11 MB
english, 1999