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SPIE Proceedings [SPIE Asia Pacific Symposium on Microelectronics and MEMS - Gold Coast, Australia (Wednesday 27 October 1999)] Electronics and Structures for MEMS - CMOS low-noise capacitance measurement circuit for micromachined gyroscope
Yu, Wen, Lim, Yong C., Tay, Francis E., Liang, Yung C., Bergmann, Neil W., Reinhold, Olaf, Tien, Norman C.Volume:
3891
Year:
1999
Language:
english
DOI:
10.1117/12.364454
File:
PDF, 256 KB
english, 1999