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SPIE Proceedings [SPIE SPIE's International Symposium on Optical Science, Engineering, and Instrumentation - Denver, CO (Sunday 18 July 1999)] Optical Diagnostics for Fluids/Heat/Combustion and Photomechanics for Solids - White-light scanning interferometry for thickness measurement of thin film layers
Kim, Gee-Hong, Kim, Seung-Woo, Cha, Soyoung S., Bryanston-Cross, Peter J., Mercer, Carolyn R.Volume:
3783
Year:
1999
Language:
english
DOI:
10.1117/12.365742
File:
PDF, 971 KB
english, 1999