SPIE Proceedings [SPIE Advanced High-Power Lasers and Applications - Osaka, Japan (Monday 1 November 1999)] High-Power Lasers in Manufacturing - High-power excimer lasers for high-throughput poly-Si annealing
Fiebig, Michael, Osmanov, Rustem, Stamm, Uwe, Vofl, Frank, Oesterlin, Peter, Kobayashi, Naoyuki, Fechner, Burkhard, Uzuka, L., Chen, Xiangli, Fujioka, Tomoo, Matsunawa, AkiraVolume:
3888
Year:
2000
Language:
english
DOI:
10.1117/12.377054
File:
PDF, 400 KB
english, 2000