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SPIE Proceedings [SPIE Microlithography 2000 - Santa Clara, CA (Sunday 27 February 2000)] Metrology, Inspection, and Process Control for Microlithography XIV - Accurate dimensional metrology with atomic force microscopy
Dixson, Ronald G., Koening, Rainer G., Fu, Joseph, Vorburger, Theodore V., Renegar, Brian T., Sullivan, Neal T.Volume:
3998
Year:
2000
Language:
english
DOI:
10.1117/12.386492
File:
PDF, 326 KB
english, 2000