SPIE Proceedings [SPIE Microlithography 2000 - Santa Clara, CA (Sunday 27 February 2000)] Optical Microlithography XIII - Modeling the effects of excimer laser bandwidths on lithographic performance
Kroyan, Armen, Bendik, Joseph J., Semprez, Olivier, Farrar, Nigel R., Rowan, Christopher G., Mack, Chris A., Progler, Christopher J.Volume:
4000
Year:
2000
Language:
english
DOI:
10.1117/12.389057
File:
PDF, 250 KB
english, 2000