SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Micromachined Devices and Components VI - Toward thermal flow-sensing with pL/s resolution
Tas, Niels R., Lammerink, Theo S. J., Leussink, Pele J., Berenschot, J. W., de Bree, H. E., Elwenspoek, Miko C., Peeters, Eric, Paul, OliverVolume:
4176
Year:
2000
Language:
english
DOI:
10.1117/12.395619
File:
PDF, 1.37 MB
english, 2000