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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Micromachined Devices and Components VI - Dual beam-mass structure gyroscope micromachined by deep RIE process
Yang, Heng, Bao, Minhang, Yin, Hao, Shen, Shaoqun, Peeters, Eric, Paul, OliverVolume:
4176
Year:
2000
Language:
english
DOI:
10.1117/12.395642
File:
PDF, 372 KB
english, 2000