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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Micromachining Technology for Micro-Optics - 3D, high-resolution deep x-ray absorber mask
Dumbravescu, Niculae, Grigore, Luminita, Lee, Sing H., Johnson, Eric G.Volume:
4179
Year:
2000
Language:
english
DOI:
10.1117/12.395694
File:
PDF, 713 KB
english, 2000