![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Monday 18 September 2000)] Challenges in Process Integration and Device Technology - Automated OPC optimization using in-line CD-SEM
Su, Bo, Menaker, Mina, Haas, Nadav, Subramanian, Ramkumar, Singh, Bhanwar, Burnett, David, Kimura, Shin'ichiro, Singh, BhanwarVolume:
4181
Year:
2000
Language:
english
DOI:
10.1117/12.395714
File:
PDF, 755 KB
english, 2000