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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Micromachining and Microfabrication Process Technology VI - Flexible processing of large scale LCD panels using scanner-deflected UV-laser radiation
Ostendorf, Andreas, Koerber, Klaus, Temme, Thorsten, Bann, Bob, Apte, Paul, Haberzettl, Heinz, Budischewski, Tatjana, Karam, Jean Michel, Yasaitis, John A.Volume:
4174
Year:
2000
Language:
english
DOI:
10.1117/12.396441
File:
PDF, 1.13 MB
english, 2000