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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Micromachining and Microfabrication Process Technology VI - Producing LIGA-competitive microcomponents
Hung, Wayne N. P., Ali, Mohammad Y., Yuan, Shu, Karam, Jean Michel, Yasaitis, John A.Volume:
4174
Year:
2000
Language:
english
DOI:
10.1117/12.396444
File:
PDF, 890 KB
english, 2000