SPIE Proceedings [SPIE Micromachining and Microfabrication...

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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Micromachining and Microfabrication Process Technology VI - Improvement of structural stability and IR-detecting characteristics of microbolometer

Kang, HoKwan, Ha, W. H., Park, C. W., Kim, Byung-Kap, Moon, Sung W., Kim, ToHoon, Karam, Jean Michel, Yasaitis, John A.
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Volume:
4174
Year:
2000
Language:
english
DOI:
10.1117/12.396452
File:
PDF, 597 KB
english, 2000
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