SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Scattering and Surface Roughness III - Development problems of a nanometer coordinate measuring machine (NCMM)
Petersen, Ralph, Rothe, Hendrik, Gu, Zu-Han, Maradudin, Alexei A.Том:
4100
Рік:
2000
Мова:
english
DOI:
10.1117/12.401663
Файл:
PDF, 1.81 MB
english, 2000