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SPIE Proceedings [SPIE Intelligent Systems and Smart Manufacturing - Boston, MA (Sunday 5 November 2000)] Microrobotics and Microassembly II - Fundamentals of piezoceramic actuation for micrometer and submicrometer motions for the NanoWalker robot
Martel, Sylvain M., Saraswat, Anant, Hunter, Ian W., Nelson, Bradley J., Breguet, Jean-MarcVolume:
4194
Year:
2000
Language:
english
DOI:
10.1117/12.403688
File:
PDF, 349 KB
english, 2000