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SPIE Proceedings [SPIE Microelectronic and MEMS Technologies - Edinburgh, United Kingdom (Wednesday 30 May 2001)] MEMS Design, Fabrication, Characterization, and Packaging - Coplanar waveguides on SOI and OPS substrates
Gamble, Harold S., Leong, Kam O., Raza, Syed H., Armstrong, Brian M., Mitchell, S. J. N., Yang, Suidong, Fusco, Vince, Stewart, Carson, Behringer, Uwe F. W., Uttamchandani, Deepak G.Volume:
4407
Year:
2001
Language:
english
DOI:
10.1117/12.425323
File:
PDF, 217 KB
english, 2001