![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Optical Engineering for Sensing and Nanotechnology (ICOSN '01) - Yokohama, Japan (Wednesday 6 June 2001)] Optical Engineering for Sensing and Nanotechnology (ICOSN 2001) - Photothermal deflection microscope with linear motor drive and its applications to NDE of microdevices
Miyamoto, Katsuhiko, Hoshimiya, Tsutomu, Iwata, KoichiVolume:
4416
Year:
2001
Language:
english
DOI:
10.1117/12.427100
File:
PDF, 262 KB
english, 2001