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SPIE Proceedings [SPIE Photonics West 2001 - LASE - San Jose, CA (Saturday 20 January 2001)] Laser Applications in Microelectronic and Optoelectronic Manufacturing VI - Laser processing of components for polymer mircofluidic and optoelectronic products
Gillner, Arnold, Bremus-Koebberling, Elke A., Wehner, Martin, Russek, Ulrich A., Berden, Thomas, Gower, Malcolm C., Helvajian, Henry, Sugioka, Koji, Dubowski, Jan J.Volume:
4274
Year:
2001
Language:
english
DOI:
10.1117/12.432535
File:
PDF, 748 KB
english, 2001