SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication - Analysis of inertia forces influence on operation voltage of electrostatic microrelays
Efremov, Georgy I., Mukhurov, Nikolay I., Helvajian, Henry, Janson, Siegfried W., Laermer, FranzVolume:
4559
Year:
2001
Language:
english
DOI:
10.1117/12.443033
File:
PDF, 102 KB
english, 2001