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SPIE Proceedings [SPIE Lasers in Metrology and Art Conservation - Munich, Germany (Monday 18 June 2001)] Microsystems Engineering: Metrology and Inspection - Paraboloidal ellipsometer with accurate retardance and latitude
Wu, Jiun-Yan, Shiue, Shuen-Chen, Lee, Chih-Kung, Lee, Solomon J. H., Gorecki, Christophe, Jueptner, Werner P. O., Kujawinska, MalgorzataVolume:
4400
Year:
2001
Language:
english
DOI:
10.1117/12.445607
File:
PDF, 665 KB
english, 2001