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SPIE Proceedings [SPIE International Symposium on Microelectronics and MEMS - Adelaide, Australia (Monday 17 December 2001)] Device and Process Technologies for MEMS and Microelectronics II - Porous silicon as a sacrificial layer used in rf MEMS
Cong, Peng, Liu, Li-Tian, Ding, Yong, Chiao, Jung-Chih, Faraone, Lorenzo, Harrison, H. Barry, Shkel, Andrei M.Volume:
4592
Year:
2001
Language:
english
DOI:
10.1117/12.448993
File:
PDF, 436 KB
english, 2001