SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 29 July 2001)] Optical Manufacturing and Testing IV - Applicability of iTIRM for roughness reduction monitoring
van der Bijl, Robert-Jaap, van Brug, Hedser H., Faehnle, Oliver W., Braat, Joseph J. M., Stahl, H. PhilipVolume:
4451
Year:
2001
Language:
english
DOI:
10.1117/12.453632
File:
PDF, 176 KB
english, 2001