SPIE Proceedings [SPIE Second International Symposium on Laser Precision Micromachining - Singapore, Singapore (Wednesday 16 May 2001)] Second International Symposium on Laser Precision Microfabrication - Fabrication of TiNi thin films by pulsed laser deposition
Chen, Xiaoyu, Lu, Yongfeng, Ren, ZhongMin, Zhu, Sha, Miyamoto, Isamu, Lu, Yong Feng, Sugioka, Koji, Dubowski, Jan J.Volume:
4426
Year:
2002
Language:
english
DOI:
10.1117/12.456841
File:
PDF, 267 KB
english, 2002