SPIE Proceedings [SPIE Design, Process Integration, and Characterization for Microelectronics - Santa Clara, CA (Wednesday 6 March 2002)] Design, Process Integration, and Characterization for Microelectronics - RET-compliant cell generation for sub-130-nm processes
Torres, Juan Andres, Chow, David, de Dood, Paul, Albers, Daniel J., Starikov, Alexander, Tobin, Jr., Kenneth W.Volume:
4692
Year:
2002
Language:
english
DOI:
10.1117/12.475688
File:
PDF, 216 KB
english, 2002