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SPIE Proceedings [SPIE High-Power Lasers and Applications - San Jose, CA (Saturday 25 January 2003)] Photon Processing in Microelectronics and Photonics II - Opportunities and challenges for laser technology in microelectronics and photonics
Hoving, Willem, Pique, Alberto, Sugioka, Koji, Herman, Peter R., Fieret, Jim, Bachmann, Friedrich G., Dubowski, Jan J., Hoving, Willem, Washio, Kunihiko, Geohegan, David B., Traeger, Frank, Murakami,Volume:
4977
Year:
2003
Language:
english
DOI:
10.1117/12.478607
File:
PDF, 688 KB
english, 2003