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SPIE Proceedings [SPIE Integrated Optoelectronics Devices - San Jose, CA (Saturday 25 January 2003)] Photonics Packaging and Integration III - High-speed short-wavelength silicon photodetectors fabricated in 130-nm CMOS process

Csutak, Sebastian M., Schaub, Jeremy D., Yang, Bo, Campbell, Joe C., Heyler, Randy A., Robbins, David J., Jabbour, Ghassan E.
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Volume:
4997
Year:
2003
Language:
english
DOI:
10.1117/12.479474
File:
PDF, 477 KB
english, 2003
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