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SPIE Proceedings [SPIE High-Power Lasers and Applications - San Jose, CA (Saturday 25 January 2003)] Photon Processing in Microelectronics and Photonics II - Femtosecond laser micromachining of silicon for MEMS
El-Bandrawy, Mohammed, Gupta, Mool C., Pique, Alberto, Sugioka, Koji, Herman, Peter R., Fieret, Jim, Bachmann, Friedrich G., Dubowski, Jan J., Hoving, Willem, Washio, Kunihiko, Geohegan, David B., TraVolume:
4977
Year:
2003
Language:
english
DOI:
10.1117/12.479556
File:
PDF, 331 KB
english, 2003