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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II - Monolithic integration of RF-MEMS and semiconductor devices for the K-band
Buck, Thomas, Reimann, Mathias, Ulm, Markus, Mueller-Fiedler, Roland, Seidel, Juergen, Kasper, Erich, Schoellhorn, Claus, Haak, Stefan, Janson, Siegfried W.Volume:
4981
Year:
2003
Language:
english
DOI:
10.1117/12.479563
File:
PDF, 519 KB
english, 2003