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SPIE Proceedings [SPIE International Symposium on High-Power Laser Ablation 2002 - Taos, NM (Monday 22 April 2002)] High-Power Laser Ablation IV - Pulsed-laser deposited TiC coatings for MEMS
Radhakrishnan, Gouri, Adams, Paul M., Robertson, Ruby E., Cole, Robert C., Phipps, Claude R.Volume:
4760
Year:
2002
Language:
english
DOI:
10.1117/12.482097
File:
PDF, 1.39 MB
english, 2002