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SPIE Proceedings [SPIE Photonics Asia 2002 - Shanghai, China (Monday 14 October 2002)] MEMS/MOEMS Technologies and Applications - Design and simulation of a bulk micromachined relay with lateral contact
Yang, Zhenchuan, Li, Zhihong, Hao, Yilong, Wu, Guoying, Jin, Guofan, McKillop, John S., Hane, KazuhiroVolume:
4928
Year:
2002
Language:
english
DOI:
10.1117/12.483185
File:
PDF, 230 KB
english, 2002