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SPIE Proceedings [SPIE Advanced Microelectronic Manufacturing - Santa Clara, CA (Sunday 23 February 2003)] Design and Process Integration for Microelectronic Manufacturing - PsmLint: bringing AltPSM benefits to the IC design stage
Ghosh, Pradiptya, Kang, Chung-Shin, Sanie, Michael, Huckabay, Judy A., Starikov, AlexanderVolume:
5042
Year:
2003
Language:
english
DOI:
10.1117/12.485253
File:
PDF, 492 KB
english, 2003