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SPIE Proceedings [SPIE Advanced Microelectronic Manufacturing - Santa Clara, CA (Sunday 23 February 2003)] Cost and Performance in Integrated Circuit Creation - Practical quality metrics for resolution enhancement software
Boone, Robert E., Lucas, Kevin, Wynd, Raphael, Boatright, Mike, Thompson, Matthew A., Reich, Alfred J., Wong, Alfred K. K., Monahan, Kevin M.Volume:
5043
Year:
2003
Language:
english
DOI:
10.1117/12.485281
File:
PDF, 543 KB
english, 2003