SPIE Proceedings [SPIE Microlithography 2003 - Santa Clara, CA (Sunday 23 February 2003)] Optical Microlithography XVI - Zero MEF hole formation with Atten-PSM and modified illumination
Nakao, Shuji, Miyagi, Tadashi, Tarutani, Shinji, Yamashita, Shigenori, Miyazaki, Junji, Kozawa, Hidehiko, Tokui, Akira, Tsujita, Kouichirou, Yen, AnthonyVolume:
5040
Year:
2003
Language:
english
DOI:
10.1117/12.485323
File:
PDF, 3.39 MB
english, 2003