SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Advanced Techniques for Integrated Circuit Processing - Etch tailoring through flexible end-point detection
Angell, David, Oehrlein, Gottleib S., Bondur, James A., Turner, Terry R.Volume:
1392
Year:
1991
Language:
english
DOI:
10.1117/12.48947
File:
PDF, 357 KB
english, 1991