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SPIE Proceedings [SPIE Problems of Theoretical and Applied Electron and Ion Optics - Moscow, Russian Federation (Wednesday 14 November 2001)] Fifth Seminar on Problems of Theoretical and Applied Electron and Ion Optics - Orthogonal-projection method for solving equations of diffusion of minority charge carriers generated by the electron beam in semiconductors
Belov, A. A., Egupov, N. D., Samokhvalov, A. A., Stepovich, M. A., Tchaikovsky, M. M., Filachev, Anatoly M.Volume:
5025
Year:
2003
Language:
english
DOI:
10.1117/12.498033
File:
PDF, 233 KB
english, 2003