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SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 23 June 2003)] Microsystems Engineering: Metrology and Inspection III - Study of subpixel image processing algorithms for MEMS in-plane vibration measurements by stroboscopic microscopy
Hafiane, Adel, Gorecki, Christophe, Petitgrand, Sylvain, Gigan, Olivier, Bouchafa, Samia, Bosseboeuf, AlainVolume:
5145
Year:
2003
Language:
english
DOI:
10.1117/12.500141
File:
PDF, 826 KB
english, 2003