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SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 23 June 2003)] Optical Measurement Systems for Industrial Inspection III - Multifrequency laser beam use in an interferometer vibration measuring system
Budnyk, Oksana P., Osten, Wolfgang, Kujawinska, Malgorzata, Lymarenko, Ruslan A., Creath, KatherineVolume:
5144
Year:
2003
Language:
english
DOI:
10.1117/12.500282
File:
PDF, 110 KB
english, 2003