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SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Multilayer and Grazing Incidence X-Ray/EUV Optics - Evaluation of reflectors for soft x-ray optics
Etoh, Kazuyuki, Hoshi, Noriyoshi, Yonemitu, Toshihiro, Durand, Herve-Andre, Delaunay, Jean-Jacques, Ito, Kazuhiko, Yamada, Ichiro, Kataoka, Izumi, Hoover, Richard B.Volume:
1546
Year:
1992
Language:
english
DOI:
10.1117/12.51215
File:
PDF, 882 KB
english, 1992