SPIE Proceedings [SPIE Smart Materials, Structures, and...

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SPIE Proceedings [SPIE Smart Materials, Structures, and Systems - Bangalore, India (Thursday 12 December 2002)] Smart Materials, Structures, and Systems - Enhancement of diffusion barrier properties of Ta by plasma immersion ion implantation

Kumar, Mukesh, Kumar, Raj, Kumar, Dinesh, Raole, P. M., George, P. J., Gupta, Suryakant B., Paul, D. K., Mohan, S., Dattaguru, B., Gopalakrishnan, S.
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Volume:
5062
Year:
2003
Language:
english
DOI:
10.1117/12.514859
File:
PDF, 341 KB
english, 2003
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