SPIE Proceedings [SPIE Optoelectronic and Electronic Sensors V - Rzeszow, Poland (Wednesday 5 June 2002)] Optoelectronic and Electronic Sensors V - Interferometry system for out-of-plane displacements and microshape measurements of silicon membranes
Jozwik, Michal, Kalita, Wlodzimierz, Sabac, Andrei, Gorecki, ChristopheVolume:
5124
Year:
2002
Language:
english
DOI:
10.1117/12.517118
File:
PDF, 296 KB
english, 2002