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SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Computer simulation of the creation of 31P-doped layer in 28Si/30Si/28Si heterostructure by neutron transmutation doping
Trushin, Yuri V., Mikhailov, Gennadi V., Zhurkin, Evgeni E., Kharlamov, Vladimir S., Schmidt, Alexander A., Krusenstern, Fedor A., Melker, Alexander I.Year:
2012
Language:
english
DOI:
10.1117/12.517949
File:
PDF, 101 KB
english, 2012