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SPIE Proceedings [SPIE Photomask Technology - Monterey, CA (Monday 8 September 2003)] 23rd Annual BACUS Symposium on Photomask Technology - Advancements in focused ion beam repair of alternating phase-shift masks
Lessing, Joshua, Kimmel, Kurt R., Staud, Wolfgang, Robinson, Tod, Morrision, Troy, Holtermann, TheresaVolume:
5256
Year:
2003
Language:
english
DOI:
10.1117/12.518319
File:
PDF, 663 KB
english, 2003