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SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, Ca (Sunday 25 January 2004)] Photon Processing in Microelectronics and Photonics III - Creating 3D structures with a direct-write grayscale photomask made from Sn/In bimetallic films
Herman, Peter R., Chapman, Glenn, Tu, Yuqiang, Fieret, Jim, Pique, Alberto, Peng, Jun, Okada, Tatsuo, Bachmann, Friedrich G., Hoving, Willem, Washio, Kunihiko, Xu, Xianfan, Dubowski, Jan J., Geohegan,Volume:
5339
Year:
2004
Language:
english
DOI:
10.1117/12.529492
File:
PDF, 561 KB
english, 2004