SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Optical Microlithography XVII - Optimization and apodization of aerial images at high NA in imaging interferometic lithography
Tridhavee, Thanis M., Smith, Bruce W., Santhanam, Balu, Brueck, Steven R. J.Volume:
5377
Year:
2004
Language:
english
DOI:
10.1117/12.533149
File:
PDF, 673 KB
english, 2004