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SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Optical Microlithography XVII - Study of OPC for AAPSM reticles using various mask fabrication techniques
Hughes, Gregory P., Smith, Bruce W., Kamaruddin, Denny, Nakagawa, Kent H., MacDonald, Susan, Wilkinson, Bill, West, Craig, Park, KeuntaekVolume:
5377
Year:
2004
Language:
english
DOI:
10.1117/12.536138
File:
PDF, 129 KB
english, 2004