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SPIE Proceedings [SPIE Smart Structures and Materials - San Diego, CA (Sunday 14 March 2004)] Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology - Oscillator microfabrication, micromagnets, and magnetic resonance force microscopy
Choi, Jae-Hyuk, Varadan, Vijay K., Mirsaidov, Utkur M., Miller, Casey W., Lee, Yong J., Guchhait, Samaresh, Chabot, Michelle D., Lu, Wei, Markert, John T.Volume:
5389
Year:
2004
Language:
english
DOI:
10.1117/12.539572
File:
PDF, 514 KB
english, 2004