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SPIE Proceedings [SPIE Smart Structures and Materials - San Diego, CA (Sunday 14 March 2004)] Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology - Integrated CMOS dew point sensors for relative humidity measurement
Savalli, Nicolo, Varadan, Vijay K., Baglio, Salvatore, Castorina, Salvatore, Sacco, Vincenzo, Tringali, CristinaVolume:
5389
Year:
2004
Language:
english
DOI:
10.1117/12.539999
File:
PDF, 450 KB
english, 2004