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SPIE Proceedings [SPIE Fourth International Symposium on laser Precision Microfabrication - Munich, Germany (Saturday 21 June 2003)] Fourth International Symposium on Laser Precision Microfabrication - Fabrication of holes and grooves on glass by a femtosecond laser
Ito, Yoshiro, Kuroi, Kazunori, Hayakawa, Kazuhide, Miyamoto, Isamu, Ostendorf, Andreas, Sugioka, Koji, Helvajian, HenryVolume:
5063
Year:
2003
Language:
english
DOI:
10.1117/12.540501
File:
PDF, 269 KB
english, 2003