SPIE Proceedings [SPIE Fourth International Symposium on laser Precision Microfabrication - Munich, Germany (Saturday 21 June 2003)] Fourth International Symposium on Laser Precision Microfabrication - Excitation, melting, ablation: theoretical investigations of key processes during ultrashort pulsed laser machining
Rethfeld, Baerbel, Sokolowski-Tinten, Klaus, von der Linde, Dietrich, Miyamoto, Isamu, Ostendorf, Andreas, Sugioka, Koji, Helvajian, HenryVolume:
5063
Year:
2003
Language:
english
DOI:
10.1117/12.540606
File:
PDF, 374 KB
english, 2003