SPIE Proceedings [SPIE Process Module Metrology, Control and Clustering - San Jose, United States (Wednesday 11 September 1991)] Process Module Metrology, Control and Clustering - Effects of feature edges on thickness readings of thin oxides
Opsal, Jon L., Willenborg, David, Fanton, Jeffrey T., Kelso, Susan M., Simmons, Jim P., Rosencwaig, Allan, Davis, Cecil J., Herman, Irving P., Turner, Terry R.Volume:
1594
Year:
1992
Language:
english
DOI:
10.1117/12.56645
File:
PDF, 488 KB
english, 1992